Orbit

年度 2010
全部作者 Wan-Chun Chuang, Hsin-Li Lee, David T. W. Lin, Yuh-Chung Hu, Pei-Zen Chang, Ngo Bao Ouyen
論文名稱 “Optimal residual stress in CMOS fabrication,” The 34th National Conference on Theoretical and Applied Mechanics, Yunlin, Taiwan, Nov. 19-20. (2010)
檔案
  • 420_d2c19bd2.pdf
  • 發表日期 2010-11-01