Orbit

年度 2005
全部作者 Yuh-Chung Hu*, Wei-Hsin Gau, and Wei-Hsiang Tu,
論文名稱 “High Precision Young’s Modulus Extraction of Thin Films through Measuring the Electric-Circuit Behavior of Microstructures,” The ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems, Pape
檔案
  • 301_d7221068.pdf
  • 發表日期 1970-01-01