Orbit

年度 2012
全部作者 Wei-Hsiang Tu, Wan-Chun Chuang, Wen-Chang Chu, Chih-Kung Lee, Pei-Zen Chang, Yuh-Chung Hu
論文名稱 "Etching holes effects on CMOS-MEMS capacitive structure," Journal of Intelligent Material Systems and Structures
發表日期 2012-06-01
檔案
  • 656_d5467dbb.pdf